WJ Semiconductor Equipment Group Receives Order for WJ-1500 Systems from a Korean Semiconductor Company|
SCOTTS VALLEY, Calif.--(BUSINESS WIRE)--March 23, 1999--WJ Semiconductor Equipment Group, Inc. (SEG), a wholly owned subsidiary of Watkins-Johnson Company (NYSE: WJ - news), announced today that it received a multiple-system order for its recently introduced WJ-1500 atmospheric-pressure chemical-vapor deposition (APCVD) system.
A large semiconductor company in Korea, one of the world's largest DRAM manufacturers, is purchasing the SEG equipment. The WJ-1500 was chosen over its competitors for its superior technology and low cost of ownership in both pre-metal dielectric (PMD) and shallow trench isolation (STI) applications.
The WJ-1500 is SEG's newest 200-mm continuous-process APCVD system. A refinement of the industry leading WJ-1000, it provides production solutions through 0.18-micron technology in PMD and STI. It offers exceptional uptime and film uniformity. The system provides production availability of 85 percent, and achieves film uniformity of less than 1.5 percent across the wafer, with non-detectable metals below 2E10 atoms per square centimeter.
WJ Semiconductor Equipment Group is also offering WJ-1500 Upgrade Kits for existing WJ-1000 installations to provide customers with extension capability for 0.18-micron technology production requirements.
''This continued business from a large Korean large DRAM manufacturer indicates that WJ APCVD systems continue to be an important part of our customers' pursuit of improved yields,'' said Tom Pye, SEG's manager of strategic planning. ''SEG's unique capabilities in gap fill and film quality continue to be the preferred solution for 0.18-micron and beyond process requirements.''
SEG is the market leader in APCVD systems for the worldwide semiconductor-manufacturing industry. The group is dedicated, through research and development, to continued expansion by meeting global demand for advanced dielectric-deposition technology.
Watkins-Johnson Company, headquartered in Palo Alto, Calif., specializes in two high-technology business areas. WJ's wireless-communications units produce radio-frequency components, subassemblies and equipment for fixed and mobile networks worldwide. The company's Semiconductor Equipment Group produces APCVD systems for high-volume integrated-circuit manufacturing. For more information, visit wj.com.
This news release contains forward-looking statements that involve risks and uncertainties, including customers seeking faster or delayed delivery based on changing needs, the impact of competitive products and pricing, and the other risks detailed from time to time in the company's SEC reports, including the report on Form 10-K for the year ended December 31, 1998. Actual results may vary materially.
WJ Semiconductor Equipment Group, Inc.
Linda L. Johnson, 831/439-6297 (Editorial)
Don Tran, 831/439-4724 (Technical)
Frank E. Emery, 650/813-2752 (Financial)