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To: Trey McAtee who wrote (22968)	10/25/1997 8:22:00 PM
From: Mr. Aloha	Respond to of 53894

Good post. How do you make a 256Mb? You use an excimer laser down to approx. .1 microns or so. :-) (CYMI) ---------------------------------- Among other major technical challenges in 0.1-micron and below wafer processing is selecting a new lithography technology - X-ray, direct write electron beam or extreme ultraviolet - to succeed venerable optical tools, Melliar-Smith said. "Excimer laser deep UV at 193-nanometer wavelength will carry us down to 0.13- to 0.1-micron feature size. Some have proposed calcium flouride excimer lasers with smaller wavelength - but there isn't enough calcium flouride material in the world to make production tools." techweb.cmp.com Aloha